北京慧摩森电子系统技术有限公司      电话: 010-62311872/0335-8603578

平面精密检测装置

文章来源:本站时间:2018-11-16 点击:707

BJSMPM-01 is a high precision scanning and measuring equipment that integrates mechanical, optical and digital servo control technology. It uses linear motors to directly drive payloads to avoid torsion, tracking error, wear, etc. , which is inherent in ball screw mechanism. Independent gantry motion and full close-loop control strategy offers high dynamic motion performance. Industrial computer, touch screen, friendly user interface, intelligent target detecting and handling, grinding marble machine chassis assure easy and reliable operation. The machine has following features.
  • High speed data acquisition up to 4Mbits/s
  • Powerful and intelligent measuring and processing capability
  • Direct linear motion with cogging free linear motors
  • High resolution encoders up to 0.1 µm 
  • Full close-loop servo motion control
  • Low velocity ripple (<0.5%)
  • Automatic target alignment and handling
  • Touch screen with free swing arm
  • Robust Industrial Computer

Specifications

  • Power Supply 230 VAC, 50Hz, 2KW(MAX)
  • Max. scanning area 230×230 mm
  • Scanning speed 20mm/s
  • Processing time £60 seconds
  • Resolution 0.1 µm in scanning axis, 1 µm in target axis
  • Repeatability 0.5 µm in scanning axis, 5 µm in target axis
  • Accuracy 1 µm in scanning axis, 10 µm in target axis
  • Target handling vacuum pump
  • Weight approx. 700 Kg
  • Size 1300×700×1260mm(L×W×H)